The miniaturization of electronic components has revolutionized technology, and understanding semiconductor device physics is crucial for modern electronics. Fundamentals of Modern VLSI Devices provides an in-depth explanation of the physical principles behind very-large-scale integration (VLSI) technology. The book discusses MOSFET operation, scaling effects, carrier transport, and device modeling. It also examines emerging technologies such as FinFETs and nanoscale transistors. Combining theory with practical design considerations, it equips engineers and students with the analytical tools needed to understand and optimize advanced semiconductor devices in integrated circuits.